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Our Products

Flexible Heaters

Thermal-Clear™ Transparent Heater

Flex-circuits and Interconnection Cables

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Thermal Solutions for the Semiconductor Industry



Uniform, responsive, reliable heat

Heat is a critical factor in processing and testing of semiconductors. A high level of available heat allows faster throughput. Reduction of temperature gradients across a heater means less variability across a wafer and thus higher yields. A heating element that’s less prone to failure cuts the risk of downtime. All these translate to productivity and profits.

Minco Thermofoil™ heater technology helps you achieve your thermal design goals.

A Thermofoil heater consists of an etched-foil element laminated between flat or flexible insulating layers. In comparison to traditional tubular or cast-in heaters, the Thermofoil construction provides more surface area for heat output. As a result, the element runs cooler even at high watt densities.

Minco offers heaters with Kapton® polyimide, silicone rubber, PTFE, and mica insulations for temperatures up to 600°C. We can also manufacture complete thermal subassemblies with heat sinks, cables, connectors, temperature sensors, thermostats, or fuses.



Download Literature

Download Thermal Solutions for the Semiconductor Industry (562.8 Kb)

Download Thermal-ProfilerTM Instrumented Wafer System (674.6 Kb)

Download All-Polymide Heater Specifications (197.7 Kb)

Download Mica Heaters Specifications (213.0 Kb)

Download Chuck Heater for Semiconductor Processing Equipment (772.6 Kb)

Download Application Aid #29 - Designing Heated Chucks for Semiconductor Processing Equipment (935.1 Kb)







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